Automatically Analysis 12" Wafer Test with FTIR Microscope
全世界第一台結合FOUP與FTIR Microscope 作12" Wafer 全自動檢測機台
遵守Semi Standards規範,全部檢測皆完全控制於標準 Mini-Evironment with ULPA 中
All computer control for Foup open,wafer mapping selection, transfer,and return
Automatically data collect any point of 12" Wafer and QC test
Build in Pressure Alert,ATR Analysis |
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